Passive Pressure Sensing

ABSTRACT

A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having a round outer perimeter. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of and claims priority toInternational Application No. PCT/US2014/070964, filed on Dec. 17, 2014,and titled “Passive Pressure Sensing,” which claims priority under 35U.S.C. Section 119(e) to U.S. Provisional Patent Application No.61/952,547, filed Mar. 13, 2014, and titled “Passive Pressure Sensing,”the entire contents of which are incorporated herein by reference.

TECHNICAL FIELD

The present disclosure relates generally to pressure sensing and moreparticularly to pressure sensing using a piezoelectric pressuretransducer.

BACKGROUND

Pressure sensors (also commonly known as pressure transducers) are oftenused for sensing fluid pressure in applications such as oil and gasproduction. For example, a fluid that is monitored for pressure mayapply fluid pressure on a pressure sensor, and the pressure sensor maysense the fluid pressure and generate, for example, a signal indicativeof the applied fluid pressure. Some existing pressure sensors mayinclude one or more resonators to sense fluid pressure.

Generally, active electronic components are often used along withresonators to sense the fluid pressure. However, due to the relativelylow temperature tolerance of active electronic components, pressuresensors that employ active electronic components may have limited use inrelatively high temperature environments. Thus, pressure sensors thatinclude active electronic components may have reliability issuescompared to pressure sensors that use only passive components thatbecome exposed to a harsh environment. Further, a pressure sensor thatincludes active electronic components may be relatively more expensivethan a pressure sensor that uses only passive components.

Accordingly, a pressure sensor that can sense fluid pressure, forexample, in an oil well, using a resonator and without active componentsor with very few high temperature tolerant active components that areexposed to a harsh environment is desirable.

SUMMARY

The present disclosure relates generally to pressure sensing using apiezoelectric pressure transducer. In an example embodiment, a pressuresensor for sensing pressure of a fluid includes a diaphragm flexure anda crystal retaining flexure. The diaphragm flexure is designed to exertan imparted force on the crystal retaining flexure that is proportionalto fluid pressure exerted on the diaphragm flexure. The pressure sensorfurther includes a disk resonator having a round outer perimeter. Incertain exemplary embodiments, the resonator may be constructed ofcrystal or ceramic, having varying frequencies, and varying geometries(such as double beam, plate, etc.). A portion of the crystal retainingflexure is positioned between the diaphragm flexure and the resonator.The crystal retaining flexure is designed to exert a load (i.e., aspecific allowable portion of the resultant imparted pressure loading)onto the resonator. The load results from the imparted force exerted onthe crystal retaining flexure by the diaphragm flexure. The loading willcause a frequency change in the resonator which is proportional to theloading, which is the fundamental methodology for sensing the fluidpressure. This configuration allows a precise and variable load to beapplied to the resonator for specific pressure sensing requirements.

In another example embodiment, a system for measuring a pressure of afluid includes a signal source and a signal receiver to determine thecrystal resonant frequency. The system further includes a pressuresensor that includes a diaphragm flexure and a crystal retainingflexure. The diaphragm flexure is designed to exert imparted force onthe crystal retaining flexure that is proportional to fluid pressureexerted on the diaphragm flexure. The pressure sensor further includes aresonator having a round outer perimeter. A portion of the crystalretaining flexure is positioned between the diaphragm flexure and theresonator. The crystal retaining flexure is designed to exert a load onthe resonator. The load results from the imparted force exerted on thecrystal retaining flexure by the diaphragm flexure. The resonator iselectrically coupled to the signal source and to the signal receiver.The pressure sensor may be calibrated between its operational parametersof pressure and temperature with calibration equipment to ensure properand accurate operation.

In another example embodiment, a method for measuring a pressure of afluid includes generating a signal by a signal source and receiving thesignal by a signal receiver through a pressure sensor. The methodfurther includes processing the signal to determine the pressure sensedby the pressure sensor. The pressure sensor includes a diaphragm flexureand a crystal retaining flexure. The pressure sensor further includes aresonator having a round outer perimeter. A portion of the crystalretaining flexure is positioned between the diaphragm flexure and theresonator. The crystal retaining flexure is designed to exert a load onthe resonator. The load results from the imparted force exerted on thecrystal retaining flexure by the diaphragm flexure. Receiving the signalthrough the pressure sensor includes receiving the signal through theresonator.

These and other aspects, objects, features, and embodiments will beapparent from the following description and the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

Reference will now be made to the accompanying drawings, which are notnecessarily drawn to scale, and wherein:

FIG. 1A is a perspective view of a pressure sensor for sensing apressure of a fluid in accordance with an example embodiment;

FIG. 1B is a side view of the pressure sensor of FIG. 1A, in accordancewith an example embodiment;

FIG. 1C is a top view of the pressure sensor of FIG. 1A, in accordancewith an example embodiment;

FIG. 2 illustrates a longitudinal cross-section of the pressure sensorof FIG. 1A, taken along section 2-2 of FIG. 1C, in accordance with anexample embodiment;

FIG. 3 illustrates a system for measuring a pressure of a fluid usingthe pressure sensor of FIG. 1A in accordance with an example embodiment;and

FIG. 4 illustrates a method for measuring a pressure of a fluid inaccordance with an example embodiment.

The drawings illustrate only example embodiments and are therefore notto be considered limiting in scope. The elements and features shown inthe drawings are not necessarily to scale, emphasis instead being placedupon clearly illustrating the principles of the example embodiments.Additionally, certain dimensions or placements may be exaggerated tohelp visually convey such principles. In the drawings, referencenumerals designate like or corresponding, but not necessarily identical,elements.

DETAILED DESCRIPTION OF THE EXAMPLE EMBODIMENTS

In the following paragraphs, particular embodiments will be described infurther detail by way of example with reference to the drawings. In thedescription, well-known components, methods, and/or processingtechniques are omitted or briefly described. Furthermore, reference tovarious feature(s) of the embodiments is not to suggest that allembodiments must include the referenced feature(s).

Turning now to the drawings, FIGS. 1A-1C illustrate a pressure sensor100 for sensing a pressure of a fluid according to an exampleembodiment. The pressure sensor 100 operates by associating pressureexerted by a fluid (“outside fluid”) that is outside of the pressuresensor 100 to a resonance frequency (also referred to as resonantfrequency) of a resonator (i.e., a piezoelectric resonator) of thepressure sensor 100. In some example embodiments, the pressure sensor100 may be placed in the annulus portion of a well between the casingand the production tubing of a wellbore. However, the pressure sensor100 can be placed in any high temperature and/or pressure sensingenvironment, such as a steam pipe, turbine, reactor, etc. The pressuresensor 100 is configured to sense a wide range of fluid pressure levelsover a wide range of temperature conditions. In some exampleembodiments, the pressure sensor 100 is configured to operate in anenvironment having a temperature that ranges from below 32 degreesFahrenheit (° F.) (gas pressure measurements) to over 600° F. In someexample embodiments, the pressure sensor may also sense pressure levelsranging from, but not limited to about 0 pound per square inch (PSI) toover 10,000 PSI. In certain exemplary embodiments, the pressure sensormay sense pressure levels up to about 30,000 PSI by modifying thegeometry and thereby the stiffness of the coupled crystal retaining anddiaphragm flexures.

As illustrated in FIGS. 1A-1C, the pressure sensor 100 includes apressure head 102, a crystal retainer 104, and a retaining disk 106. Oneor more wires 110 may extend through corresponding passageways 108 toelectrically couple the resonator of the pressure sensor 100 to a signalsource/signal receiver. In certain embodiments, the pressure sensor 100also includes a housing (not shown) that covers the exterior of thepressure sensor 100. For example, the pressure head 102 and theretaining disk 106 may be configured to mate with respective ends of thehousing so as to substantially cover the crystal retainer 104. In someexample embodiments, the length of the pressure sensor 100 inclusive ofthe pressure head 102, the crystal retainer 104, and the retaining disk106 may be about 7 inches, and the diameter of the pressure sensor 100may be approximately 1 inch. In alternative embodiments, the pressuresensor 100 may be much larger or smaller than 7 inches in length, andmay be larger or smaller than 1 inch in height.

As described in more detail below, the pressure head 102 may include afluid inlet that may be coupled to a pipe that connects the pressuresensor 100 to the outside fluid to be monitored for pressure. Forexample, the pipe may be coupled to a structure that isolates pressuresensor 100 from the outside fluid. Alternatively, the pressure sensor100 may be enclosed in an outer housing or sleeve (not shown) thatprotects the pressure sensor 100 from exposure to the environment. Toillustrate, the fluid inlet of the pressure head 102 may be exposed tothe external environment, and the pressure sensor 100 may sense thepressure of the fluid through the fluid inlet (for example, the fluidinlet 202 shown in FIG. 2).

As described in more detail below, the pressure sensor 100 includes aresonator that oscillates at a frequency that depends on the amount ofpressure/loading applied to the resonator. The pressure sensor 100imparts a load that is proportional to the fluid pressure onto theresonator in the pressure sensor 100 such that the pressure exerted onthe resonator is less than and proportional to the fluid pressure. Byallowing only a fraction of the fluid pressure load to be exerted on theresonator, the integrity of the resonator can be maintained. Therelationship between the fluid pressure and the load exerted on theresonator can be used to associate a resonance frequency of theresonator to the fluid pressure. Because the resonance frequency of theresonator is dependent on the load exerted onto the resonator, theresonance frequency of the resonator may be used to determine the fluidpressure because of the relationship between the fluid pressure and theload exerted on the resonator. The pressure sensor 100 may be calibratedbetween its operational parameters of pressure and temperature withcalibration equipment to ensure reliable operation.

Referring to FIG. 2, FIG. 2 illustrates a longitudinal cross-section ofthe pressure sensor 100, along section 2-2 of FIG. 1C, in accordancewith an example embodiment. As illustrated in FIG. 2, the pressuresensor 100 includes the pressure head 102, the crystal retainer 104, andthe retaining disk 106. The pressure sensor 100 further includes adiaphragm flexure 206, a crystal retaining flexure 208, and a resonator210. The crystal retaining flexure 208 is positioned between thediaphragm flexure 206 and the resonator 210 on a first side of theresonator 210. In some example embodiments, the crystal retainer 104includes the crystal retaining flexure 208.

In some example embodiments, the diaphragm flexure 206, the crystalretaining flexure 208, and the resonator 210 are in physical contactwith the respective adjacent components. To illustrate, the diaphragmflexure 206 is in contact with the crystal retaining flexure 208, andthe crystal retaining flexure 208 is in contact with the resonator 210.In certain example embodiments, a protrusion 218 of the diaphragmflexure 206 may be in contact with the crystal retaining flexure 208.

In some example embodiments, each of the diaphragm flexure 206 and thecrystal retaining flexure 208 may be made from steel, such as stainlesssteel. Further, the retaining disk 106 may also be made from steel oranother structurally adequate and otherwise suitable material. Inembodiments of the pressure sensor 100 that include a housing (notshown), the housing may also be made from steel or another structurallyadequate and otherwise suitable material. In some example embodiments,the resonator 210 may be a quartz resonator, such as an ultra-lowfrequency (˜20-50 kHz) quartz crystal resonator, and thus may be wellsuited for deep well applications since low frequency translates to lesssignal attenuation and thereby longer passive detection distances. Inother embodiments, the resonator 210 may be a ceramic resonator and mayhave alternate geometric configurations than shown in FIG. 2. Generally,the resonator 210 is electrically coupled to a signal source/signalreceiver via electrical conductors. For example, one or more wires 110that are electrically isolated from the crystal retaining flexure 208may extend through the crystal retaining flexure 208 (e.g., through thepassageways 108 shown in FIGS. 1A and 1B) to electrically couple theresonator 210 to a signal source/signal receiver.

Generally, the diaphragm flexure 206, the crystal retaining flexure 208,the resonator 210, and at least a portion of the pressure head 102 maybe positioned within a housing (not shown). In some example embodiments,the diaphragm flexure 206 may be attached to the housing at the edgeportions of the diaphragm flexure 206 such that a middle portion 220 ofthe diaphragm flexure 206 can move laterally in response to pressureapplied to the diaphragm flexure 206 by a fluid in a chamber 216. Themovement of the diaphragm flexure 206 laterally applies a force on afirst end of the crystal retaining flexure 208. The structure of thecrystal retaining flexure 208 is such that a uniform compressive load(with no moments) can thereby be imparted on the resonator 210. Forexample, the crystal retaining flexure 208 may serve to reduce theamount of load transferred to the resonator 210 from the diaphragmflexure 206 and thereby reduce the risk of damage to the resonator 210.In certain exemplary embodiments, the crystal retaining flexure 208 isgenerally in the shape of a plus (+) sign and includes a center 208 awith a first, second, third, and fourth extension 208 b, 208 c, 208 d,208 e, protruding therefrom. The first extension 208 b is in contactwith the protrusion 218 of the diaphragm flexure 206. The second andthird extensions 208 c, 208 d are perpendicular to the first and fourthextensions 208 b, 208 e. The fourth extension 208 e includes a mountingportion 208 f configured to receive a portion of a round outer perimeter210 a of the resonator 210. To illustrate, the mounting portion 208 fmay be curved to match the shape of the portion of the round outerperimeter 210 a such that the mounting portion 208 f is in contact withthe portion of the round outer perimeter 210 a.

Because the housing and the diaphragm flexure 206 may be made from anelectrically conductive material, the housing and the diaphragm flexure206 may be electrically coupled to each other. Further, a particularterminal (e.g., a ground potential terminal) of the resonator 210 may becoupled to the crystal retaining flexure 208 such that the particularterminal is electrically coupled to the housing 106 through thediaphragm flexure 206 that is in contact with the crystal retainingflexure 208. In some example embodiments, the housing may be coupled toa casing (e.g., conductive pipe at ground potential) of a wellbore thatis electrically isolated from a production tubing (e.g., a smallerconductive pipe) that the casing surrounds. For example, the casing maybe coupled to a signal source or receiver that may be above ground.

In one embodiment, the resonator 210 may be disk-shaped. For example,the resonator 210 may have the round outer perimeter 210 a. When theresonator 210 is stressed or loaded in a specific manner, there may be ameasurable change in the mechanical resonance frequency along a broadside of the disk-shaped resonator. Generally, the resonator 210 may beat least partially retained by the fourth extension 208 e and by acurved structure 234 of the crystal retainer 104. For example, a portionof the round outer perimeter 210 a may be positioned against the curvedmounting portion 208 f, and an opposite portion of the round outerperimeter 210 a may be positioned against curved structure 234. Toillustrate, the crystal retaining flexure 208 may exert a load on theresonator 210 at the portion of the round outer perimeter 210 a of theresonator 210 that is in contact with the curved mounting portion 208 f,and the curved structure 234 may exert the same amount of force(reactive force) on the opposite portion of the round outer perimeter210 a that is in contact with the structure 234.

The retaining disk 106 is positioned at an end of the crystal retainingflexure 208 and in one embodiment, serves to retain atemperature-sensitive pre-packaged canned crystal. As illustrated inFIG. 2, the retaining disk 106 may be coupled to the crystal retainer104 by screws 212. Alternatively or in addition, the retaining disk 106may be coupled to the crystal retainer 104 by other means includingother fasteners and/or soldering/brazing/welding. In some exampleembodiments, the retaining disk 106 and the crystal retainer 104 mayinclude one or more passageways 108 (shown in FIGS. 1A and 1B) that areused to route, for example, the one or more electrical wires 110 to theresonator 210. For example, the one or more wires 110 may electricallycouple the resonator 210 to a production tubing (e.g., a steel pipe) ofan oil well that may be used to carry a signal between the pressuresensor 100 and, for example, a signal source/receiver that may be aboveground.

In some example embodiments, the pressure head 102 includes a fluidinlet 202 and a channel 214 extending between the fluid inlet 202 andthe chamber 216. As illustrated in FIG. 2, the chamber 216 is partiallybounded by the diaphragm flexure 206. For example, the chamber 216 maycontain an isolation fluid that is separated by a structure (forexample, a bellows) from the outside fluid that is monitored forpressure. To illustrate, the fluid in the chamber 216 may be a hydraulicfluid. The fluid contained in the chamber 216 may exert fluid pressureon the diaphragm flexure 206. For example, the fluid pressure exerted onthe diaphragm flexure 206 by the fluid contained in the chamber 216 maybe substantially the same amount of pressure exerted by the outsidefluid that is monitored by the pressure sensor 100. In some alternativeembodiments, the chamber 216 may contain the outside fluid instead of anisolation fluid. To illustrate, in some example embodiments, thepressure sensor 100 may not include a separator.

The pressure exerted on the resonator 210 is related to the fluidpressure exerted on the diaphragm flexure 206 by the fluid in thechamber 216. To illustrate, the diaphragm flexure 206 is designed toexert the imparted force on the crystal retaining flexure 208, whichthen applies a uniform load on the resonator 210. In some exampleembodiments, the resonator 210 may oscillate at a particular resonancefrequency in response to load applied to the resonator 210 by thecrystal retaining flexure 208.

In some example embodiments, a pipe (e.g., a pipe 308 shown in FIG. 3)that is attached to the fluid inlet 202 may contain the same fluid thatis contained in the chamber 216 and may serve as a passageway totransfer pressure from the outside fluid to the fluid in the chamber216. For example, the pressure of the outside fluid can be transferredto an isolation fluid in the chamber 216 through the pipe and thechannel 214. Although a single channel and a single fluid inlet areshown in FIG. 2, in alternative embodiments, the pressure head 102 mayinclude multiple channels and/or multiple fluid inlets. Further, inalternative embodiments, the pressure head 102 may include multiplefluid inlets and multiple chambers that are partially bounded by thediaphragm flexure 206.

After a reference resonance frequency of the resonator 210 is determinedbased on a reference pressure that is exerted on the diaphragm flexure206 by the fluid contained in the chamber 216, a resonance frequency ofthe resonator 210 resulting from a change in the pressure exerted on theresonator 210 may be used to determine the pressure exerted by the fluidcontained in the chamber 216. To illustrate, because the resonancefrequency of the resonator 210 is dependent on the load exerted on theresonator 210, the relationship between the fluid pressure exerted onthe diaphragm flexure 206, the imparted force exerted on the crystalretaining flexure 208 by the diaphragm flexure 206, and the load that isexerted on the resonator 210 by the crystal retaining flexure 208 can beused to associate a resonance frequency of the resonator 210 to thefluid pressure.

In general, after determining a reference oscillation frequency of theresonator 210, for example, that corresponds to an initial amount (e.g.,substantially zero) of the fluid pressure exerted on the diaphragmflexure 206, changes in the fluid pressure exerted on the diaphragmflexure 206 may be determined based on the corresponding change in theoscillation frequency of the resonator 210, for example, relative to thereference oscillation frequency.

By using high temperature compliant metal and high temperature compliantcrystal (e.g., quartz, gallium phosphate of varying frequencies)components and by eliminating the placement of active electroniccomponents within the pressure sensor 100, the pressure sensor 100allows pressure sensing to be performed, for example, in relatively hightemperature environments. Further, in some example embodiments, thepressure sensor 100 may be produced more cost effectively than pressuresensors that include generally more costly active components. In somealternative embodiments, the pressure sensor 100 may include some activecomponents such as a gain device/amplifier (that are high temperaturetolerant) for deep well applications.

FIG. 3 illustrates a system 300 for measuring a pressure of a fluidusing the pressure sensor 100 (FIGS. 1A-1C) in accordance with anexample embodiment. The system 300 includes a network analyzer 302 andthe pressure sensor 100. In an example embodiment, the network analyzer302 includes a signal source that generates a signal and a signalreceiver that receives a signal. For example, the network analyzer 302may output a signal via the first port 310 and may receive a signal viathe second port 312. Alternatively, the network analyzer 302 may outputa signal via the second port 312 and may receive a signal via the firstport 310. To illustrate, the first port 310 and the second port 312 maybe electrically coupled to terminals/electrodes of the resonator 210 ofthe pressure sensor 100 such that an electrical signal can travelfrom/to the first port 310 and the second port 312 to/from theterminals/electrodes of the resonator 210. For example, the first port310 may be electrically coupled to one terminal/electrode of theresonator 210 via a wire (e.g., the wire 110) extending through thepassageway 108 in the retaining disk 106 and the crystal retainer 104shown in FIGS. 1A and 1B. In alternative embodiments, the first port 310may be electrically coupled to a terminal/electrode of the resonator 210without using the passageway 108.

In some example embodiments, the first port 310 may be electricallycoupled to a terminal/electrode of the resonator 210 of the pressuresensor 100 via an electrical connection 304. Similarly, the second port312 of the network analyzer 302 may be electrically coupled to anotherterminal/electrode of the resonator 210 via an electrical connection306. In some example embodiments, the electrical connection 304 mayinclude a production tubing of an oil well, and the electricalconnection 306 may include a casing of the oil well. For example, thecasing of the oil well may be electrically connected to the housing (notshown) of the pressure sensor 100 when the pressure sensor 100 ispositioned in the annulus between the casing and the production tubing.

In some example embodiments, the network analyzer 302 may send a signalto the resonator 210 via the electrical connection 306 and may receivethe signal from the resonator 210 via the electrical connection 304. Insome alternative embodiments, the network analyzer 302 may send a signalto the resonator 210 via the electrical connection 304 and may receivethe signal from the resonator 210 via the electrical connection 306. Thenetwork analyzer 302 may vary the frequency of the signal provided tothe resonator 210 to sweep through a range of frequencies to determinethe resonance frequency of the resonator 210, which is indicative of thepressure sensed by the pressure sensor 100.

To illustrate, as explained above, the resonance frequency of theresonator 210 of the pressure sensor 100 depends on the pressure/loadapplied to the resonator 210. By performing calibration of the pressuresensor 100 to determine a reference resonance frequency of the resonator210 that corresponds to a reference fluid pressure of the outside fluidthat is monitored for pressure, changes in the fluid pressure of theoutside fluid may be determined by determining changes in the resonancefrequency of the resonator 210. For example, the amount of change in thefluid pressure may be determined based on the particular resonancefrequency relative to the reference resonance frequency. In some exampleembodiments, the pressure sensor 100 may be connected to the outsidefluid that is monitored for pressure via the pipe 308.

By performing a frequency sweep (i.e., by varying the frequency) of thesignal generated by the network analyzer 304 and processing the signalreceived by the network analyzer 304 through the pressure sensor 100(i.e., through the resonator 210), the resonance frequency that isindicative of the fluid pressure may be determined. The resonancefrequency of the resonator 210 may be determined by processing thesignal, after the signal is received by the network analyzer 302, todetermine one or more parameters, such as voltage level, power, and/orfrequency of the signal.

Because pressure readings may be temperature dependent, a temperaturesensitive crystal of the resonator 210 allows for the consideration ofthermal effects that result in a reliable pressure reading. Temperaturecrystals can be of the canned type or mounted exposed to mimic the heattransfer mechanism/path of the crystal for more accurate pressurereadings during a transient thermal phase (i.e., when pressure sensor100 is being heated/cooled by steam injection process).

In an example embodiment, the network analyzer 302 can process thesignal received through the pressure sensor 100 to determine one or moreparameters and to further determine the pressure sensed by the pressuresensor 100 based on the one or more parameters. Alternatively, thenetwork analyzer 302 may determine the one or more parameters of thesignal and pass the parameter(s) and/or other information to anotherdevice to determine the pressure of a fluid sensed by the pressuresensor 100. Those of skill in the art will appreciate that aconventional computing device comprising one or more processors and oneor more memories may be included in or operate with the network analyzer302. Network analyzer 302 may also include communications modules forwired or wireless communications with other local or remote computingdevices.

In some alternative embodiments, instead of the network analyzer 302,separate signal source and signal receiver may be used to send andreceive the signal to/from the pressure sensor 100. Further, in someembodiments, the connection 306 may be at an electrical ground potentialand may be coupled to an electrical ground.

FIG. 4 illustrates a method 400 for measuring a pressure of a fluid inaccordance with an example embodiment. The method 400 includesgenerating a signal by a signal source, at 402. For example, the networkanalyzer 302 of FIG. 3 may generate a signal that is provided to aresonator (e.g., the resonator 210 of FIG. 2) of the pressure sensor 100of FIGS. 1A-1C. The method 400 also includes receiving the signal by asignal receiver through a pressure sensor, at 404. For example, thenetwork analyzer 302 may receive the signal through the pressure sensor100. To illustrate, the network analyzer 302 may receive the signalthrough the resonator 210.

The method 400 further includes processing the signal to determine thepressure sensed by the pressure sensor, at 306. For example, the networkanalyzer 302 of FIG. 3 may process the signal received through theresonator 210 to determine the pressure sensed by the pressure sensor100. For example, processing the signal to determine the pressure sensedby the pressure sensor may include determining one or more parameters ofthe signal, such as the voltage level, power, and/or frequency of thesignal at one or both of the signal source and the signal receiver. Toillustrate, processing the signal may include determining a voltagelevel of the signal after the signal is received by the signal receiver.In some example embodiments, the method 400 also includes varying afrequency of the signal by the signal source to determine the resonancefrequency of the resonator of the pressure sensor 100. For example, thepressure sensed by the pressure sensor 100 can be determined based onthe frequency of the signal, which may be indicative of the pressuresensed by the pressure sensor when the frequency of the signal matchesthe resonant frequency of the resonator 210 of the pressure sensor 100,as described above.

At 408, the method 400 concludes with storing the information resultingfrom the processing. For example, the information may be stored in amemory, such as a static random access memory.

Although some embodiments have been described herein in detail, thedescriptions are by way of example. The features of the embodimentsdescribed herein are representative and, in alternative embodiments,certain features, elements, and/or steps may be added or omitted.Additionally, modifications to aspects of the embodiments describedherein may be made by those skilled in the art without departing fromthe spirit and scope of the following claims, the scope of which are tobe accorded the broadest interpretation so as to encompass modificationsand equivalent structures.

What is claimed is:
 1. A pressure sensor for sensing pressure of afluid, the pressure sensor comprising: a diaphragm flexure; a crystalretaining flexure, wherein the diaphragm flexure is designed to exert animparted force on the crystal retaining flexure and wherein the impartedforce is proportional to fluid pressure exerted on the diaphragmflexure; and a disk resonator having a round outer perimeter, wherein aportion of the crystal retaining flexure is positioned between thediaphragm flexure and the resonator, and wherein the crystal retainingflexure is designed to exert a load on the resonator, the load resultingfrom the imparted force exerted on the crystal retaining flexure by thediaphragm flexure.
 2. The pressure sensor of claim 1, wherein thediaphragm flexure is in contact with the crystal retaining flexure andwherein the crystal retaining flexure is in contact with a portion ofthe round perimeter of the resonator.
 3. The pressure sensor of claim 1,wherein the diaphragm flexure is designed to move toward the crystalretaining flexure in response to an increase in the fluid pressure,wherein the crystal retaining flexure is designed to move toward theresonator in response to an increase in the imparted force, and whereinthe resonator is designed to oscillate at a resonant frequency inresponse to the load exerted onto the resonator.
 4. The pressure sensorof claim 3, further comprising a chamber at least partially bounded bythe diaphragm flexure, wherein the fluid pressure is exerted by a fluidcontained in the chamber and wherein the fluid is isolated from thecrystal retaining flexure and the resonator.
 5. The pressure sensor ofclaim 4, further comprising a pressure head having a fluid inlet and achannel, wherein the channel extends between the fluid inlet and thechamber.
 6. The pressure sensor of claim 5, wherein the diaphragmflexure, the crystal retaining flexure, the resonator, and at least aportion of the pressure head are positioned within a housing.
 7. Thepressure sensor of claim 4, wherein the fluid is a hydraulic fluidseparated from an outside fluid that exerts external fluid pressure thatis sensed by the pressure sensor.
 8. The pressure sensor of claim 3,wherein the load exerted on the resonator is proportional to theimparted force exerted on the crystal retaining flexure.
 9. The pressuresensor of claim 1, wherein the diaphragm flexure comprises a protrusionthat is in contact with the crystal retaining flexure.
 10. A system formeasuring a pressure of a fluid, the system comprising: a signal source;a signal receiver; and a pressure sensor comprising: a diaphragmflexure; a crystal retaining flexure, wherein the diaphragm flexure isdesigned to exert an imparted force on the crystal retaining flexure,wherein the imparted force is proportional to fluid pressure exerted onthe diaphragm flexure; and a disk resonator having a round outerperimeter, wherein a portion of the crystal retaining flexure ispositioned between the diaphragm flexure and the resonator, and whereinthe crystal retaining flexure is designed to exert a load on theresonator, the load resulting from the imparted force exerted on thecrystal retaining flexure by the diaphragm flexure, and wherein theresonator is electrically coupled to the signal source and to the signalreceiver.
 11. The system of claim 10, wherein the crystal retainingflexure is coupled to a ground potential electrode of the resonator andwherein a positive potential is coupled to a second electrode of theresonator.
 12. The system of claim 10, wherein the resonator is a quartzresonator and wherein the signal source is configured to vary afrequency of a signal provided to the resonator.
 13. The system of claim10, wherein the resonator is disk-shaped and wherein the signal sourceis configured to vary a frequency of a signal provided to the resonator.14. The system of claim 10, wherein the pressure sensor furthercomprises a chamber at least partially bounded by the diaphragm flexure,wherein the fluid pressure is exerted by a fluid contained in thechamber, wherein the fluid is isolated from the crystal retainingflexure and the resonator, and wherein the load exerted on the resonatoris proportional to the imparted force exerted on the crystal retainingflexure.
 15. The system of claim 14, wherein the pressure sensor furthercomprises a pressure head having a fluid inlet and a channel and whereinthe channel extends between the fluid inlet and the chamber.
 16. Thesystem of claim 14, wherein the fluid is a hydraulic fluid separatedfrom an outside fluid that exerts external fluid pressure that is sensedby the pressure sensor.
 17. A method for measuring a pressure of afluid, the method comprising: generating a signal by a signal source;receiving the signal by a signal receiver through a pressure sensor;processing the signal to determine the pressure sensed by the pressuresensor, the pressure sensor comprising: a diaphragm flexure; a crystalretaining flexure; and a disk resonator having a round outer perimeter,wherein a portion of the crystal retaining flexure is positioned betweenthe diaphragm flexure and the resonator, wherein the crystal retainingflexure is designed to exert a load on the resonator, the load resultingfrom an imparted force exerted on the crystal retaining flexure by thediaphragm flexure, and wherein receiving the signal through the pressuresensor comprises receiving the signal through the resonator.
 18. Themethod of claim 17, wherein the pressure sensor further comprises achamber at least partially bounded by the diaphragm flexure, wherein afluid pressure is exerted by a fluid contained in the chamber, whereinthe fluid is isolated from the crystal retaining flexure and theresonator.
 19. The method of claim 17, further comprising varying afrequency of the signal by the signal source.
 20. The method of claim19, wherein processing the signal includes determining a voltage levelof the signal after the signal is received by the signal receiver.